One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d
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| Main Authors: | , |
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| Format: | Bài trích |
| Language: | eng |
| Published: |
Lecture Notes in Mechanical Engineering
2021
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| Subjects: | |
| Online Access: | https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110 https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734 |
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| Summary: | Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d |
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