One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress

Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d

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Bibliographic Details
Main Authors: Vu Le Huy, Shoji Kamiya
Format: Bài trích
Language:eng
Published: Lecture Notes in Mechanical Engineering 2021
Subjects:
Online Access:https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110
https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734
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