One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress

Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d

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Bibliographic Details
Main Authors: Vu Le Huy, Shoji Kamiya
Format: Bài trích
Language:eng
Published: Lecture Notes in Mechanical Engineering 2021
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Online Access:https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110
https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734
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spelling oai:localhost:PNK-27342022-08-17T05:54:46Z One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress Vu Le Huy Shoji Kamiya Compressive stress Silicon MEMS Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d 2021-09-10T04:46:50Z 2021-09-10T04:46:50Z 2021 Bài trích https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110 https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734 10.1007/978-3-030-69610-8_110 eng Lecture Notes in Mechanical Engineering
institution Digital Phenikaa
collection Digital Phenikaa
language eng
topic Compressive stress
Silicon
MEMS
spellingShingle Compressive stress
Silicon
MEMS
Vu Le Huy
Shoji Kamiya
One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
description Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d
format Bài trích
author Vu Le Huy
Shoji Kamiya
author_facet Vu Le Huy
Shoji Kamiya
author_sort Vu Le Huy
title One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
title_short One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
title_full One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
title_fullStr One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
title_full_unstemmed One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
title_sort one more evidence supporting damage growth inside silicon mems structures from comparison of strength affected by cyclic compressive stress
publisher Lecture Notes in Mechanical Engineering
publishDate 2021
url https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110
https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734
_version_ 1751856261887950848
score 8.891053