One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress
Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d
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Lecture Notes in Mechanical Engineering
2021
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| Truy cập trực tuyến: | https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110 https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734 |
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oai:localhost:PNK-27342022-08-17T05:54:46Z One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress Vu Le Huy Shoji Kamiya Compressive stress Silicon MEMS Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d 2021-09-10T04:46:50Z 2021-09-10T04:46:50Z 2021 Bài trích https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110 https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734 10.1007/978-3-030-69610-8_110 eng Lecture Notes in Mechanical Engineering |
| institution |
Digital Phenikaa |
| collection |
Digital Phenikaa |
| language |
eng |
| topic |
Compressive stress Silicon MEMS |
| spellingShingle |
Compressive stress Silicon MEMS Vu Le Huy Shoji Kamiya One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress |
| description |
Recently, dislocation in single-crystal silicon has been confirmed to be induced by fatigue. It was found that the fatigue lifetime of silicon is likely to be dominated by accumulation of crystal defects, i.e., dislocations. In previous studies, crystal d |
| format |
Bài trích |
| author |
Vu Le Huy Shoji Kamiya |
| author_facet |
Vu Le Huy Shoji Kamiya |
| author_sort |
Vu Le Huy |
| title |
One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress |
| title_short |
One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress |
| title_full |
One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress |
| title_fullStr |
One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress |
| title_full_unstemmed |
One More Evidence Supporting Damage Growth Inside Silicon MEMS Structures from Comparison of Strength Affected by Cyclic Compressive Stress |
| title_sort |
one more evidence supporting damage growth inside silicon mems structures from comparison of strength affected by cyclic compressive stress |
| publisher |
Lecture Notes in Mechanical Engineering |
| publishDate |
2021 |
| url |
https://link.springer.com/chapter/10.1007/978-3-030-69610-8_110 https://dlib.phenikaa-uni.edu.vn/handle/PNK/2734 |
| _version_ |
1751856261887950848 |
| score |
8.891053 |