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Silicon VLSI technology : fundamentals, practice, and modeling /

Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those tech...

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Bibliographic Details
Main Author: Plummer, James D.
Other Authors: Deal, Michael D., Griffin, Peter B.
Format: Book
Language:English
Published: Upper Saddle River, N.J. : Prentice Hall, 2000.
Series:Prentice Hall electronics and VLSI series
Subjects:
Integrated circuits > Very large scale integration > Design and construction
Metal oxide semiconductors
Silicon
Silicon oxide films
Silicon-on-insulator technology
Online Access:https://dlib.phenikaa-uni.edu.vn/handle/PNK/1842
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300 |a xiv, 817 p. :  |b ill. ;  |c 25 cm. 
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520 3 |a Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes. 
650 0 4 |a Integrated circuits  |x Very large scale integration  |x Design and construction 
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