Silicon VLSI technology : fundamentals, practice, and modeling /

Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those tech...

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Bibliographic Details
Main Author: Plummer, James D.
Other Authors: Deal, Michael D., Griffin, Peter B.
Format: Book
Language:English
Published: Upper Saddle River, N.J. : Prentice Hall, 2000.
Series:Prentice Hall electronics and VLSI series
Subjects:
Online Access:https://dlib.phenikaa-uni.edu.vn/handle/PNK/1842
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