Silicon VLSI technology : fundamentals, practice, and modeling /
Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those tech...
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| Tác giả chính: | |
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| Đồng tác giả: | , |
| Định dạng: | Sách |
| Ngôn ngữ: | English |
| Nhà xuất bản: |
Upper Saddle River, N.J. :
Prentice Hall,
2000.
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| Tùng thư: | Prentice Hall electronics and VLSI series
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| Chủ đề: | |
| Truy cập trực tuyến: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1842 |
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| Tóm tắt: | Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes. |
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| Mô tả vật lý: | xiv, 817 p. : ill. ; 25 cm. |
| Số ISBN: | 0130850373 |