Nanolithography and patterning techniques in microelectronics /
Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provide...
Lưu vào:
| Tác giả chính: | |
|---|---|
| Định dạng: | Sách |
| Ngôn ngữ: | English |
| Nhà xuất bản: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
2005.
|
| Chủ đề: | |
| Truy cập trực tuyến: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1153 |
| Từ khóa: |
Thêm từ khóa
Không có từ khóa, Hãy là người đầu tiên đánh dấu biểu ghi này!
|
| LEADER | 01816nam a22002777a 4500 | ||
|---|---|---|---|
| 005 | 20210429120114.0 | ||
| 008 | 200404s2005 enk|||||||||||||||||eng|| | ||
| 999 | |c 2184 |d 2184 | ||
| 020 | |a 0849334470 (CRC) | ||
| 020 | |a 1845690907 (ebook) | ||
| 020 | |a 1855739313 (Woodhead) | ||
| 020 | |a 9781855739314 | ||
| 040 | |a Phenikaa-Uni |b vie |c Phenikaa-Uni |e aacr2 | ||
| 041 | 0 | |a eng | |
| 044 | |a enk | ||
| 082 | 0 | 4 | |2 23 |a 621.381 |b N105-O 2005 |
| 100 | 1 | |a Bucknall, David G. | |
| 245 | 1 | 0 | |a Nanolithography and patterning techniques in microelectronics / |c edited by David G. Bucknall. |
| 260 | |a Cambridge : |b Woodhead Pub. ; |a Boca Raton, FL : |b CRC Press, |c 2005. | ||
| 300 | |a xiv, 409 p. : |b ill. ; |c 24 cm. | ||
| 520 | 3 | |a Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, use of nanostencils, photolithography, and inkjet printing. It also discusses prototyping and the manufacture of particular devices. With a distinguished team of contributors, this is an ideal reference for researchers and professionals using advanced polymers in such areas as microelectronics and biomedical devices. | |
| 650 | 0 | 4 | |a Nanolithography |
| 650 | 0 | 4 | |a Nanotechnology |
| 856 | |u https://dlib.phenikaa-uni.edu.vn/handle/PNK/1153 | ||
| 942 | |2 ddc |c SACH | ||
| 952 | |0 0 |1 0 |2 ddc |4 0 |6 621_381000000000000_N105O_2005 |7 1 |9 9098 |a PHENIKAA |b PHENIKAA |c PNK_105 |d 2020-04-15 |l 0 |o 621.381 N105-O 2005 |p 00017542 |r 2020-04-15 |w 2020-04-15 |x 1 bản đọc tại chỗ |y SACH |z Đọc tại chỗ |x 1 bản đọc tại chỗ | ||