MEMS : introduction and fundamentals /

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most compreh...

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Bibliographic Details
Other Authors: Gad-el-Hak, Mohamed, 1945-
Format: Textbook
Language:English
Published: Boca Raton : CRC/Taylor & Francis, 2006.
Edition:2nd ed.
Series:The MEMS handbook
Mechanical engineering series
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Online Access:https://dlib.phenikaa-uni.edu.vn/handle/PNK/1812
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https://dlib.phenikaa-uni.edu.vn/handle/PNK/1812

Tầng 4 - A10 - Khu đọc mở

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Call Number: 621.381 M202S 2006
Barcode 00018003 Not for loan  Recall This
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