Fundamentals of microfabrication and nanotechnology. Vol 1 /
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...
Saved in:
Main Author: | |
---|---|
Format: | Textbook |
Language: | English |
Published: |
Boca Raton, FL :
CRC Press,
c2012.
|
Edition: | 3rd ed. |
Subjects: | |
Online Access: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1714 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Internet
https://dlib.phenikaa-uni.edu.vn/handle/PNK/1714Tầng 4 - A10 - Khu đọc mở
Call Number: |
620/.5 F512D V.1-2012 |
---|---|
Barcode 00018013 |
Not for loan
Recall This
Notes:
|