Fundamentals of microfabrication and nanotechnology. Vol 1 /
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...
Saved in:
| Main Author: | |
|---|---|
| Format: | Textbook |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
c2012.
|
| Edition: | 3rd ed. |
| Subjects: | |
| Online Access: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1714 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!