Fundamentals of microfabrication and nanotechnology. Vol 1 /

"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...

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Bibliographic Details
Main Author: Madou, Marc J.
Format: Textbook
Language:English
Published: Boca Raton, FL : CRC Press, c2012.
Edition:3rd ed.
Subjects:
Online Access:https://dlib.phenikaa-uni.edu.vn/handle/PNK/1714
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