Nanolithography and patterning techniques in microelectronics /

Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provide...

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Bibliographic Details
Main Author: Bucknall, David G.
Format: Book
Language:English
Published: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, 2005.
Subjects:
Online Access:https://dlib.phenikaa-uni.edu.vn/handle/PNK/1153
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