Bucknall, D. G. (2005). Nanolithography and patterning techniques in microelectronics. Cambridge : Boca Raton, FL: Woodhead Pub. ; CRC Press.
Chicago Style CitationBucknall, David G. Nanolithography and Patterning Techniques in Microelectronics. Cambridge : Boca Raton, FL: Woodhead Pub. ; CRC Press, 2005.
MLA CitationBucknall, David G. Nanolithography and Patterning Techniques in Microelectronics. Cambridge : Boca Raton, FL: Woodhead Pub. ; CRC Press, 2005.
Warning: These citations may not always be 100% accurate.