Nanolithography and patterning techniques in microelectronics /
Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provide...
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| Format: | Book |
| Language: | English |
| Published: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
2005.
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| Subjects: | |
| Online Access: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1153 |
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Internet
https://dlib.phenikaa-uni.edu.vn/handle/PNK/1153Tầng 4 - A10 - Khu đọc mở
| Call Number: |
621.381 N105-O 2005 |
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| Barcode 00017542 |
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