Investigation of the optical, electrical, and elemental properties upon annealing of spatial atomic layer deposited (SALD) Al-doped ZnO thin films
Al-doped ZnO (AZO) has received significant attention due to its inherent properties like wide bandgap, high optical transparency, and electrical conductivity that has established its potential application in optoelectronic devices. The primary challenge in the efficient use of AZO thin films is the...
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| Main Authors: | , , , , , |
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| Format: | Bài trích |
| Language: | eng |
| Published: |
Proceedings of SPIE - The International Society for Optical Engineering
2021
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| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11687/2590655/Investigation-of-the-optical-electrical-and-elemental-properties-upon-annealing/10.1117/12.2590655.short https://dlib.phenikaa-uni.edu.vn/handle/PNK/2850 https://doi.org/10.1117/12.2590655 |
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