Nanoscale Film Thickness Gradients Printed in Open Air by Spatially Varying Chemical Vapor Deposition
Nanoscale films are integral to all modern electronics. To optimize device performance, researchers vary the film thickness by making batches of devices, which is time-consuming and produces experimental artifacts. Thin films with nanoscale thickness gradients that are rapidly deposited in open air...
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Main Authors: | , , , , , , , , , , , |
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Format: | Bài trích |
Language: | eng |
Published: |
Advanced Functional Materials
2021
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Online Access: | https://onlinelibrary.wiley.com/doi/10.1002/adfm.202103271 https://dlib.phenikaa-uni.edu.vn/handle/PNK/2819 https://doi.org/10.1002/adfm.202103271 |
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