Investigation of the optical, electrical, and elemental properties upon annealing of spatial atomic layer deposited (SALD) Al-doped ZnO thin films

Al-doped ZnO (AZO) has received significant attention due to its inherent properties like wide bandgap, high optical transparency, and electrical conductivity that has established its potential application in optoelectronic devices. The primary challenge in the efficient use of AZO thin films is the...

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Bibliographic Details
Main Authors: Punam Murkute, Carmen Jiménez, Abderrahime Sekkat, Chiara Crivello, Viet Huong Nguyen, David Muñoz Rojas
Format: Bài trích
Language:eng
Published: Proceedings of SPIE - The International Society for Optical Engineering 2021
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11687/2590655/Investigation-of-the-optical-electrical-and-elemental-properties-upon-annealing/10.1117/12.2590655.short
https://dlib.phenikaa-uni.edu.vn/handle/PNK/2850
https://doi.org/10.1117/12.2590655
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