Fundamentals of microfabrication and nanotechnology. Vol 2 /
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...
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| Main Author: | |
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| Format: | Textbook |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
c2012.
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| Edition: | 3rd ed. |
| Subjects: | |
| Online Access: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1714 |
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