Fundamentals of microfabrication and nanotechnology. Vol 3 /

"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si...

Full description

Saved in:
Bibliographic Details
Main Author: Madou, Marc J.
Format: Textbook
Language:Vietnamese
Published: Boca Raton, FL : CRC Press, c2012.
Edition:3rd ed.
Subjects:
Online Access:https://dlib.phenikaa-uni.edu.vn/handle/PNK/1714
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items