MEMS : introduction and fundamentals /
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most compreh...
Saved in:
| Other Authors: | |
|---|---|
| Format: | Textbook |
| Language: | English |
| Published: |
Boca Raton :
CRC/Taylor & Francis,
2006.
|
| Edition: | 2nd ed. |
| Series: | The MEMS handbook
Mechanical engineering series |
| Subjects: | |
| Online Access: | https://dlib.phenikaa-uni.edu.vn/handle/PNK/1812 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|