Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thick...
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| Main Authors: | , , , , , |
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| Format: | Bài trích |
| Language: | English |
| Published: |
American Chemical Society
2022
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| Subjects: | |
| Online Access: | https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378 https://dlib.phenikaa-uni.edu.vn/handle/PNK/5768 https://doi.org/10.1021/acs.nanolett.1c04378 |
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