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1

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MEMS : introduction and fundamentals /

Published 2006

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2

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Smart sensors and MEMS : [proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] /

Published 2004

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3

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Fundamentals of microfabrication and nanotechnology.

by Madou, Marc J.
Published 2012

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4

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Fundamentals of microfabrication and nanotechnology.

by Madou, Marc J.
Published 2012

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5

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Fundamentals of microfabrication and nanotechnology.

by Madou, Marc J.
Published 2012

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Textbook

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