Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor

A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thick...

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Bibliographic Details
Main Authors: Kissan, Mistry, Viet Huong, Nguyen, Mohamed, Arabi
Format: Bài trích
Language:English
Published: ACS Publications 2022
Subjects:
Online Access:https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378
https://dlib.phenikaa-uni.edu.vn/handle/PNK/5910
https://doi.org/10.1021/acs.nanolett.1c04378
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