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Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor

A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thick...

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Main Authors: Kissan, Mistry, Viet Huong, Nguyen, Mohamed, Arabi
Format: Bài trích
Language:English
Published: ACS Publications 2022
Subjects:
Microcantilever
Nanocantilever
Online Access:https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378
https://dlib.phenikaa-uni.edu.vn/handle/PNK/5910
https://doi.org/10.1021/acs.nanolett.1c04378
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spelling oai:localhost:PNK-59102022-08-17T05:54:55Z Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor Kissan, Mistry Viet Huong, Nguyen Mohamed, Arabi Microcantilever Nanocantilever A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors. 2022-07-13T01:59:53Z 2022-07-13T01:59:53Z 2022 Bài trích https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378 https://dlib.phenikaa-uni.edu.vn/handle/PNK/5910 https://doi.org/10.1021/acs.nanolett.1c04378 en ACS Publications
institution Digital Phenikaa
collection Digital Phenikaa
language English
topic Microcantilever
Nanocantilever
spellingShingle Microcantilever
Nanocantilever
Kissan, Mistry
Viet Huong, Nguyen
Mohamed, Arabi
Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
description A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors.
format Bài trích
author Kissan, Mistry
Viet Huong, Nguyen
Mohamed, Arabi
author_facet Kissan, Mistry
Viet Huong, Nguyen
Mohamed, Arabi
author_sort Kissan, Mistry
title Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_short Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_full Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_fullStr Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_full_unstemmed Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_sort highly sensitive self-actuated zinc oxide resonant microcantilever humidity sensor
publisher ACS Publications
publishDate 2022
url https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378
https://dlib.phenikaa-uni.edu.vn/handle/PNK/5910
https://doi.org/10.1021/acs.nanolett.1c04378
_version_ 1751856288023707648
score 8.887836

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