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Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor

A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thick...

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Main Authors:	Kissan, Mistry, Viet Huong, Nguyen, Mohamed, Arabi, Khaled, H. Ibrahim, Hatameh, Asgarimoghaddam, Mustafa, Yavuz
Format:	Bài trích
Language:	English
Published:	American Chemical Society 2022
Subjects:	Microcantilever Nanocantilever
Online Access:	https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378 https://dlib.phenikaa-uni.edu.vn/handle/PNK/5768 https://doi.org/10.1021/acs.nanolett.1c04378
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spelling	oai:localhost:PNK-57682022-08-17T05:54:54Z Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor Kissan, Mistry Viet Huong, Nguyen Mohamed, Arabi Khaled, H. Ibrahim Hatameh, Asgarimoghaddam Mustafa, Yavuz Microcantilever Nanocantilever A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors. 2022-05-05T07:26:22Z 2022-05-05T07:26:22Z 2022 Bài trích https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378 https://dlib.phenikaa-uni.edu.vn/handle/PNK/5768 https://doi.org/10.1021/acs.nanolett.1c04378 en American Chemical Society
institution	Digital Phenikaa
collection	Digital Phenikaa
language	English
topic	Microcantilever Nanocantilever
spellingShingle	Microcantilever Nanocantilever Kissan, Mistry Viet Huong, Nguyen Mohamed, Arabi Khaled, H. Ibrahim Hatameh, Asgarimoghaddam Mustafa, Yavuz Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
description	A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors.
format	Bài trích
author	Kissan, Mistry Viet Huong, Nguyen Mohamed, Arabi Khaled, H. Ibrahim Hatameh, Asgarimoghaddam Mustafa, Yavuz
author_facet	Kissan, Mistry Viet Huong, Nguyen Mohamed, Arabi Khaled, H. Ibrahim Hatameh, Asgarimoghaddam Mustafa, Yavuz
author_sort	Kissan, Mistry
title	Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_short	Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_full	Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_fullStr	Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_full_unstemmed	Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
title_sort	highly sensitive self-actuated zinc oxide resonant microcantilever humidity sensor
publisher	American Chemical Society
publishDate	2022
url	https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04378 https://dlib.phenikaa-uni.edu.vn/handle/PNK/5768 https://doi.org/10.1021/acs.nanolett.1c04378
_version_	1751856282079330304
score	8.891145

Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor

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