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Smart sensors and MEMS : [proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] /

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Bibliographic Details
Corporate Author: NATO Advanced Study Institute on Smart Sensors and MEMS Póvoa de Varzim, Portugal)
Other Authors: Gomes, Maria Teresa S. R., Yurish, Sergey Y.
Format: Textbook
Language:English
Published: Dordrecht ; Boston : Kluwer Academic, c2004.
Subjects:
Detectors > Technological innovations > Congresses.
Microelectromechanical systems > Congresses.
Scanning systems > Congresses.
Sistemas microeletromecânicos (congressos)
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