Staff View: Smart sensors and MEMS :

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Bibliographic Details
Corporate Author:	NATO Advanced Study Institute on Smart Sensors and MEMS Póvoa de Varzim, Portugal)
Other Authors:	Gomes, Maria Teresa S. R., Yurish, Sergey Y.
Format:	Textbook
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic, c2004.
Subjects:	Detectors > Technological innovations > Congresses. Microelectromechanical systems > Congresses. Scanning systems > Congresses. Sistemas microeletromecânicos (congressos)
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245	1	0	\|a Smart sensors and MEMS : \|b [proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] / \|c edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes.
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