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Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition

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Bibliographic Details
Main Authors: Angermann, Martina, Jakopic, Georg, Prietl, Christine
Format: Book
Language:English
Published: Springer 2023
Subjects:
RuO2
CSD
Online Access:https://link.springer.com/article/10.1007/s10971-023-06221-8
https://dlib.phenikaa-uni.edu.vn/handle/PNK/9056
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spelling oai:localhost:PNK-90562023-09-18T02:13:20Z Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition Angermann, Martina Jakopic, Georg Prietl, Christine RuO2 CSD CC_BY Ruthenium dioxide (RuO2) thin films were synthesized by Chemical Solution Deposition (CSD) on silicon substrates using only water and acetic acid as solvents. The microstructure, phase purity, electrical and optical properties as well as the thermal stability of the thin films have been characterized. The microstructure of the thin films strongly depends on the annealing temperature: A smooth thin film was achieved at an annealing temperature of 600 °C. Higher annealing temperatures (800 °C) led to radial grain growth and an inhomogeneous thin film. A very low resistivity of 0.89 µΩm was measured for a 220 nm-thick thin film prepared at 600 °C. The resistivity of the thin films increases with temperature, which indicates metallic behavior. 2023-09-18T02:13:20Z 2023-09-18T02:13:20Z 2023 Book https://link.springer.com/article/10.1007/s10971-023-06221-8 https://dlib.phenikaa-uni.edu.vn/handle/PNK/9056 en application/pdf Springer
institution Digital Phenikaa
collection Digital Phenikaa
language English
topic RuO2
CSD
spellingShingle RuO2
CSD
Angermann, Martina
Jakopic, Georg
Prietl, Christine
Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition
description CC_BY
format Book
author Angermann, Martina
Jakopic, Georg
Prietl, Christine
author_facet Angermann, Martina
Jakopic, Georg
Prietl, Christine
author_sort Angermann, Martina
title Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition
title_short Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition
title_full Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition
title_fullStr Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition
title_full_unstemmed Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition
title_sort highly conductive ruo2 thin films from novel facile aqueous chemical solution deposition
publisher Springer
publishDate 2023
url https://link.springer.com/article/10.1007/s10971-023-06221-8
https://dlib.phenikaa-uni.edu.vn/handle/PNK/9056
_version_ 1779307150695202816
score 8.887836

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