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Investigation of the optical, electrical, and elemental properties upon annealing of spatial atomic layer deposited (SALD) Al-doped ZnO thin films

by Punam Murkute, Carmen Jiménez, Abderrahime Sekkat, Chiara Crivello, Viet Huong Nguyen, David Muñoz Rojas
Published 2021

“..., structural, and electrical qualities of the formed thin films were evaluated using various techniques. X-ray...”
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